Chrome Mask

Chrome Mask

As the patterns of semiconductor integrated circuit structure are formed on chromium coated quartz or soda-lime, the ability to express the fine image of a resist used in exposure apparatus using visible light, ultraviolet, X-ray, etc., In general, is excellent.

Chrome Mask Specification

Contents Specification
Level 1 2 3 4 5
Address Grid Plot Pitch 0.012㎛ 0.0125㎛ 0.025㎛ 0.05㎛ 0.1㎛
CD (Critical Dimension) 1.2㎛ 1.5㎛ 3.0㎛ 5.0㎛ 10.0㎛
CD Tolerance ± 0.10㎛ ± 0.15㎛ ± 0.30㎛ ± 0.50㎛ ± 1.00㎛
Substrate Only Quartz Base Quartz or Soda-Lime Base
Material Size 5 X 5 Inch ~ 2,100 X 2,500 ㎜
Thickness 1.5T / 2.3T / 3.0T / 4.8T / 5.0T / 10T / 13T

Chrome Mask Line Up

NEPCO starts first to produce the largest size photomask in KOREA.

Size

Thickness [mm]

Substrate

Special Option

Sortation [mm] [in] 1.5 2.3 3.0 4.8 6.35 7.8 Soda-Lime Quartz Tempax Anti-ESD Pellicle
Small Mask 127.0 x 127.0 5 x 5            
152.4 x 152.4 6 x 6            
177.8 x 177.8 7 x 7            
Large Mask 203.2 x 203.2 8 x 8                  
228.6 x 228.6 9 x 9              
350 x 350 -                
355.6 x 355.6 14 x 14            
355.6 x 431.8 14 x 17                  
406.4 x 533.4 16 x 21                  
508.0 x 609.6 20 x 24              
609.6 x 609.6 24 x 24                
609.6 x 711.2 24 x 28            
700.0 x 800.0 -              
812.8 x 1092.2 32 x 43              
914.4 x 1498.6 36 x 59                  
1,100 x 1,260 -                  
1,220 x 1,400 -                  
2,100 x 2,500 -                  

Please contact us for special size and thickness.

Light wavelength and light source

Photomask is made by developing a pattern onto a blank mask, which is a raw material.
On a blank mask, PR (photoresist) applied as a thin film for light exposure.
There are positive and negative PR., and positive type PR is mainly used for photomask. The molecules in PR react and separate during exposure process and then the exposed area of PR is removed during development process.

Source of Light Wavelength
EUV 10~100 ㎚
ARF 193 ㎚
KRF 248 ㎚
I-LINE 365 ㎚
H-LINE 405 ㎚
G-LINE 436 ㎚
about-image
Color Frequency Wavelength
Violet 668 ~ 789 THz 380 ~ 450 ㎚
Blue 631 ~ 668 THz 450 ~ 475 ㎚
Cyan 606 ~ 630 THz 476 ~ 495 ㎚
Green 526 ~ 606 THz 495 ~ 570 ㎚
Yellow 508 ~ 526 THz 570 ~ 590 ㎚
Orange 484 ~ 508 THz 590 ~ 620 ㎚
Red 400 ~ 484 THz 620 ~ 750 ㎚

Properties of Quartz & Soda-Lime

Material SiO2 Al2O3 R2O3 Na2O K2O RO Heat Properties
Quartz 100 4~5X10-7 / ℃
Soda-Lime 73 1 15 1 10 81~94X10-7 / ℃
Chrome 70X10-7 / ℃

Thermal expansion coefficient of Quartz & Soda-Lime

Standard

When using Quartz & Soda lime, it means the distance change of 500mm standard distance, by 1 degree temperature change.

Quartz

In case of quartz, 0.25um distance change occurred by 1 degree temperature change with 500mm standard distance.

Soda-Lime

In the case of soda lime, 4.05um by 1 degree temperature change.