AF Coating
AF(Anti-Fouling) Coating
Photomask anti-fouling is used to protect mask surface from contamination by thin-film coating.
Furthermore it has special advantage to wipe off easily the contaminations on a surface by using a dry wiper, so it can improve product yield.
Basic structure of the anti-fouling coating
Glass surface energy = 310 mJ/m2
Perfluoro compound surface energy = 18 mJ/m2
Our anti-fouling coating technology is to build anti fouling function by reducing surface energy about 20 times less than the normal glass mask by stably forming a layer consisting of perfluoro composite on it.
Benefits of anti-fouling coating
Work H&S
Ensure work safety by eliminating hazardous chemicals
Easy and simple chemical free photomask cleaning
Green Policy
Non-chemical based environmentally friendly cleaning process
Cost Reduction
Improve productivity by reducing photomask cleaning process tine.
No use of cleaning chemicals such as solvents, acids or alkalis
Reducing provisional facility investment burden : cleaning facilities and LDI
Improvement of the exposure yield
(photoresist and organic particulate deposition, Prevents contamination particulate particles and haze, and provides efficient cleaning control of contaminated substrates)
| Sortation | Inspection yield | Foreign matter detection amount |
|---|---|---|
| Anti-fouling Coating Mask Application Process | 99.8 | 1.2 |
| General mask application process | 98.9 | 2.3 |
Improve production by applying anti-fouling coating masks.