NEO Mask Coating & liquid coating
NEO Mask Coating & liquid coating
It is coated on a surface of emulsion mask to protect mask from airborne molecules or other types of contaminations.
Coated Emulsion Mask has the advantage of improving the cleaning ability and production yield by improving surface anti-fouling property.
Comparison of characteristics according to Photo Mask type
◎ The best ○ Excellent △ Ordinary
| Sortation | Photomask type | Remark | |||||
|---|---|---|---|---|---|---|---|
| Chrome | Coated emulsion mask | None coated | Film | ||||
| NEO Mask Coating | liquid coating | ||||||
| Hardness | 5H | 6B | 2.5H | B~2B | B~2B | Hardness test @ CT-PC1 (KS M ISO 15184, Class 9H~6B) |
|
| Transmittance | 85%~87% | 79~84% | 81~86% | 85~88% | 65~68% | Spectrophotometer @ 365-405nm (KS B ISO 9211-3) |
|
| Adhesiveness | Class 0 | Class 0 | Class 0 | Class 0 | Class 0 | 3M tape, 1mm cross cut (KS M ISO 2409, Class 0~5) |
|
| Hydrophobicity | 42° (on Cr) 36.9° (on Glass) |
95.26° | 83.34° | 57.5° | 33°~43° | Contact angle measurement (KS L 2110) |
|
| Anti-ESD | Semi-permanent | Permanent | Permanent | Permanent | Permanent | Electrostatic discharge test (KS C IEC 61340-5-1) |
|
| Chemical Resistance | IPA | ◎ | ◎ | ◎ | △ | △ | |
| Acetone | ◎ | ◎ | ◎ | △ | △ | ||
| MEK | ◎ | ◎ | ◎ | △ | △ | ||
| Acid | ◎ | ◎ | ◎ | △ | △ | Dipping test @ 96% H2SO4, 80℃, 60s | |
| Alkali | ◎ | ◎ | △ | △ | △ | Dipping test @ 5% KOH, 80℃, 1hr | |
| Easy Cleaning | ○ | ◎ | ◎ | △ | △ | associated chemical resistance and water resistance | |
| Position accuracy | ○ (Soda-Lime) |
○ (Soda-Lime) |
○ (Soda-Lime) |
○ (Soda-Lime) |
△ (Polyester) |
Dependency of exposure facility accuracy and substrate thermal expansion property | |
| Lifetime | ◎ | ○ | ◎ | ○ | △ | ||
| Rework | X | ○ | X | X | X | Neo mask coating is easy to Re-Coating | |
| Delivery | ○ | ○ | ○ | ○ | ◎ | ||
| Price | △ | ○ | ○ | ○ | ◎ | ||
| Features | · Good(Excellent) fine pattern coverage · Good(Excellent) pattern shape |
· Excellent anti-fouling and water repellency · easy to clean · Good protection · Re-coating possible |
· Excellent anti-fouling and water repellency · easy to clean (vulnerable to Alkaline) · Good protection · Re-coating impossible |
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